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Vacuum Probe Station with Keithley 4200-scs semiconductor parameter analyzer & 4225 PMU

E-beam evaporator

Atomic Layer Deposition for high-k (Thermal)

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Ultrawide wavelength range opto-electrical probe station

Yellow clean booth & Mask aligner

Raman/PL spectroscopy with photocurrent mapping system

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Reactive ion etcher

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Atomic Layer Deposition for TMDCs (Thermal)

Opto-electornic Artificial synapse characteristics measurement system

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Vacuum chamber probe station for gas sensing & Parameter analyzer (HP4156b)

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